Number of the records: 1
Measurements of current density distribution in shaped e-beam writers
- 1.Bok, Jan - Horáček, Miroslav - Kolařík, Vladimír - Urbánek, Michal - Matějka, Milan - Krzyžánek, Vladislav
Measurements of current density distribution in shaped e-beam writers.
Microelectronic Engineering. Roč. 149, JAN 5 (2016), s. 117-124. ISSN 0167-9317. E-ISSN 1873-5568
Impact factor: 1.806, year: 2016
http://hdl.handle.net/11104/0255378
Number of the records: 1