Number of the records: 1  

Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning

  1. 1.
    Meluzín, Petr - Horáček, Miroslav - Urbánek, Michal - Bok, Jan - Krátký, Stanislav - Matějka, Milan - Chlumská, Jana - Kolařík, Vladimír
    Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning.
    NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014. ISBN 978-80-87294-55-0.
    [NANOCON 2014. International Conference /6./. Brno (CZ), 05.11.2014-07.11.2014]
    http://hdl.handle.net/11104/0241326
Number of the records: 1  

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