Number of the records: 1
AFM nanometrology interferometric system with the compensation of angle errors
- 1.Hrabina, Jan - Lazar, Josef - Klapetek, P. - Číp, Ondřej
AFM nanometrology interferometric system with the compensation of angle errors.
Optical Measurement Systems for Industrial Inspection VII (Proceedings of SPIE Vol. 8082). Bellingham: SPIE, 2011, 80823U:1-6. ISBN 978-0-8194-8678-3.
[Optical Measurement Systems for Industrial Inspection VII. Munich (DE), 23.05.2011-26.05.2011]
http://hdl.handle.net/11104/0202169
Number of the records: 1