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Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering

  1. 1.
    Suchaneck, G. - Labitzke, R. - Adolphi, B. - Jastrabík, Lubomír - Adámek, Petr - Drahokoupil, Jan - Hubička, Zdeněk - Kiselev, D.A. - Kholkin, A. L. - Gerlach, G. - Dejneka, Alexandr
    Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering.
    Surface and Coatings Technology. Roč. 205, č. 2 (2011), S241-S244. ISSN 0257-8972
    Impact factor: 1.867, year: 2011
    http://hdl.handle.net/11104/0200083
Number of the records: 1  

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