Number of the records: 1
Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina
- 1.Pokorný, Petr - Bulíř, Jiří - Lančok, Ján - Musil, Jindřich - Novotný, Michal
Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina.
Plasma Processes and Polymers. Roč. 7, č. 11 (2010), s. 910-914. ISSN 1612-8850. E-ISSN 1612-8869
Impact factor: 1.643, year: 2010
http://hdl.handle.net/11104/0191144
Number of the records: 1