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Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films

  1. 1.
    Vetushka, Aliaksi - Fejfar, Antonín - Ledinský, Martin - Rezek, Bohuslav - Stuchlík, Jiří - Kočka, Jan
    Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films.
    Physica Status Solidi C. Roč. 7, 3-4 (2010), s. 728-731. ISSN 1862-6351
    http://www3.interscience.wiley.com/journal/123289759/abstract
    http://hdl.handle.net/11104/0188465
Number of the records: 1  

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