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Measurements of plasma parameters during Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films deposition by double hollow cathode plasma jet system

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    Olejníček, Jiří - Hubička, Zdeněk - Virostko, Petr - Deyneka, Alexander - Jastrabík, Lubomír - Adámek, P. - Šícha, M. - Tichý, M. - Šíchová, H.
    Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system.
    Czechoslovak Journal of Physics. Roč. 56, Suppl. B (2006), B1283-B1289. ISSN 0011-4626
    Impact factor: 0.568, year: 2006
    http://hdl.handle.net/11104/0005187
Number of the records: 1