Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double RF hollow cathode plasma jet system

Hubička, Zdeněk - Virostko, Petr - Tichý, M. - Čada, Martin - Adámek, Petr - Olejníček, Jiří - Deyneka, Alexander - Churpita, Olexandr - Valvoda, V. - Jastrabík, Lubomír
Deposition of Ba_xSr_1-xTiO₃ thin films by double RF hollow cathode plasma jet system.
Contributions to Plasma Physics. Roč. 48, 5-7 (2008), s. 515-520. ISSN 0863-1042. E-ISSN 1521-3986
Impact factor: 1.250, year: 2008
http://hdl.handle.net/11104/0168325