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Deposition of Organosilicon Polymer Thin Films by Plasma Enhanced Chemical Vapor Deposition

  1. 1.
    Zajíčková, L. - Buršíková, V. - Sťahel, P. - Buršík, Jiří - Peřina, Vratislav - Macková, Anna - Dubroka, A.
    Deposition of Organosilicon Polymer Thin Films by Plasma Enhanced Chemical Vapor Deposition.
    Pardubice: Univerzita Pardubice, 2006. 4 s.
    [International Conference of Solid State Chemistry /7./. Pardubice (CZ), 24.09.2006-29.09.2006]
    http://hdl.handle.net/11104/0138433
Number of the records: 1  

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