RF Hollow Cathode Plasma Jet Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. Films

Ianno, N.J. - Soukup, R. J. - Hubička, Zdeněk - Olejníček, Jiří - Šíchová, Hana
RF Hollow Cathode Plasma Jet Deposition of Ba_xSr_1-xTiO₃ Films.
Materials, Integration and Technology for Monolithic Instruments. Pittsburgh: Warendale, PA, 2005 - (Theil, A.; Bohm, M.; Gardner, S.; Blalock, T.), D2.4.1-D2.4.6. Material Research Society Symposium Proc, 869. ISBN 1-55899-823-3.
[MRS Spring Meeting. San Francisco (US), 28.03.2005-01.04.2005]
http://hdl.handle.net/11104/0117285