Number of the records: 1
Laser system for measuring MEMS relief created by the method of deep reactive ion etching
- 1.Maňka, Tadeáš - Šerý, Mojmír - Krátký, Stanislav - Zemánek, Pavel
Laser system for measuring MEMS relief created by the method of deep reactive ion etching.
21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics. (Proceedings of SPIE 10976). Bellingham: SPIE, 2018 - (Zemánek, P.), č. článku 109760M. ISBN 9781510626072. ISSN 0277-786X.
[Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics /21./. Lednice (CZ), 03.09.2018-07.09.2018]
OECD category: Optics (including laser optics and quantum optics)
http://hdl.handle.net/11104/0291094
Number of the records: 1