Number of the records: 1
Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition
- 1.Průcha, Lukáš - Daniel, Benjamin - Piňos, Jakub - Mikmeková, Eliška
Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition.
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. Brno: Institute of Scientific Instruments The Czech Academy of Sciences, 2018, s. 60-61. ISBN 978-80-87441-23-7.
[Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Skalský dvůr (CZ), 04.06.2018-08.06.2018]
OECD category: Electrical and electronic engineering
http://hdl.handle.net/11104/0287627
Number of the records: 1