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A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing

  1. 1.
    Talbi, A. - Gimeno, L. - Gerbedoen, J.-C. - Viard, R. - Soltani, A. - Mortet, Vincent - Preobrazhensky, V. - Merlen, A. - Pernod, P.
    A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing.
    Journal of Micromechanics and Microengineering. Roč. 25, č. 2 (2015), s. 1-8, č. článku 125029. ISSN 0960-1317. E-ISSN 1361-6439
    OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
    Impact factor: 1.768, year: 2015
    http://hdl.handle.net/11104/0281253
Number of the records: 1  

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