Number of the records: 1
PEC Reliability in 3D E-beam DOE Nanopatterning
- 1.Krátký, Stanislav - Urbánek, Michal - Kolařík, Vladimír
PEC Reliability in 3D E-beam DOE Nanopatterning.
Microscopy and Microanalysis. Roč. 21, S4 (2015), s. 230-235. ISSN 1431-9276. E-ISSN 1435-8115
Impact factor: 1.730, year: 2015
http://hdl.handle.net/11104/0252722
Number of the records: 1