Number of the records: 1
Exposure Time Comparison between E-beam Writer with Gaussian Beam and Variable Shaped Beam
- 1.Horáček, Miroslav - Krátký, Stanislav - Urbánek, Michal - Kolařík, Vladimír - Meluzín, Petr - Matějka, Milan - Chlumská, Jana
Exposure Time Comparison between E-beam Writer with Gaussian Beam and Variable Shaped Beam.
NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014. ISBN 978-80-87294-55-0.
[NANOCON 2014. International Conference /6./. Brno (CZ), 05.11.2014-07.11.2014]
http://hdl.handle.net/11104/0241322
Number of the records: 1