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Multidimensional interferometric tool for the local probe microscopy nanometrology

  1. 1.
    Hrabina, Jan - Lazar, Josef - Klapetek, P. - Číp, Ondřej
    Multidimensional interferometric tool for the local probe microscopy nanometrology.
    Measurement Science and Technology. Roč. 22, č. 9 (2011), 094030:1-8. ISSN 0957-0233. E-ISSN 1361-6501
    Impact factor: 1.494, year: 2011
    http://hdl.handle.net/11104/0201133
Number of the records: 1  

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