Number of the records: 1
Time-resolved investigation of dual high power impulse magnetronsputtering with closed magnetic field during deposition of Ti–Cu thin films
- 1.Straňák, Vítězslav - Čada, Martin - Hubička, Zdeněk - Tichý, M. - Hippler, R.
Time-resolved investigation of dual high power impulse magnetronsputtering with closed magnetic field during deposition of Ti–Cu thin films.
Journal of Applied Physics. Roč. 108, č. 4 (2010), 043305/1-043305/8. ISSN 0021-8979. E-ISSN 1089-7550
Impact factor: 2.064, year: 2010
http://jap.aip.org/resource/1/japiau/v108/i4/p043305_s1
http://hdl.handle.net/11104/0195448
Number of the records: 1