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Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model

  1. 1.
    Navrátil, Z. - Dvořák, P. - Brzobohatý, Oto - Trunec, D.
    Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model.
    Journal of Physics D-Applied Physics. Roč. 43, Nov 3 (2010), 505203:1-11. ISSN 0022-3727. E-ISSN 1361-6463
    Impact factor: 2.105, year: 2010
    http://hdl.handle.net/11104/0190757
Number of the records: 1  

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