Number of the records: 1
Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide
- 1.Novotný, Michal - Bulíř, Jiří - Pokorný, Petr - Bočan, Jiří - Fitl, Přemysl - Lančok, Ján - Musil, Jindřich
Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide.
Journal of Optoelectronics and Advanced Materials. Roč. 12, č. 3 (2010), 697-700. ISSN 1454-4164. E-ISSN 1841-7132
Impact factor: 0.412, year: 2010
http://hdl.handle.net/11104/0005901
Number of the records: 1