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Conjugated Silicon–Based Polymer Resists for Nanotechnologies: EB and UV Meditated Degradation Processes in Polysilanes

  1. 1.
    Schauer, F. - Schauer, Petr - Kuřitka, I. - Hua, B.
    Conjugated Silicon–Based Polymer Resists for Nanotechnologies: EB and UV Meditated Degradation Processes in Polysilanes.
    Materials Transactions. Roč. 51, č. 2 (2010), s. 197-201. ISSN 1345-9678. E-ISSN 1347-5320
    Impact factor: 0.779, year: 2010
    http://hdl.handle.net/11104/0184761
Number of the records: 1  

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