Number of the records: 1
Comparative study of total power density at a substrate in pulsed DC magnetron and hollow-cathode plasma jet sputtering systems
- 1.Čada, Martin - Virostko, Petr - Kment, Štěpán - Hubička, Zdeněk
Comparative study of total power density at a substrate in pulsed DC magnetron and hollow-cathode plasma jet sputtering systems.
Plasma Processes and Polymers. Roč. 6, S1 (2009), S247-S252. ISSN 1612-8850. E-ISSN 1612-8869.
[International Conference on Plasma Surface Engineering /11./. Garmisch Partenkirchen, 15.09.2008-19.09.2008]
Impact factor: 4.037, year: 2009
http://hdl.handle.net/11104/0179607
Number of the records: 1