Number of the records: 1
Homogenization of CZ Si wafers by Tabula Rasa annealing
- 1.Meduňa, M. - Caha, O. - Kuběna, J. - Kuběna, A. - Buršík, Jiří
Homogenization of CZ Si wafers by Tabula Rasa annealing.
Physica B-Condensed Matter. Roč. 404, - (2009), s. 4637-4640. ISSN 0921-4526. E-ISSN 1873-2135
Impact factor: 1.056, year: 2009
http://hdl.handle.net/11104/0177972
Number of the records: 1