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Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double RF hollow cathode plasma jet system

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    Hubička, Zdeněk - Virostko, Petr - Tichý, M. - Čada, Martin - Adámek, Petr - Olejníček, Jiří - Deyneka, Alexander - Churpita, Olexandr - Valvoda, V. - Jastrabík, Lubomír
    Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system.
    Contributions to Plasma Physics. Roč. 48, 5-7 (2008), s. 515-520. ISSN 0863-1042. E-ISSN 1521-3986
    Impact factor: 1.250, year: 2008
    http://hdl.handle.net/11104/0168325
Number of the records: 1