Number of the records: 1
Copper nitride thin films prepared by the RF plasma chemical reactor with low pressure supersonic single and multi-plasma jet system
- 1.Soukup, Ladislav - Šícha, M. - Fendrych, František - Jastrabík, Lubomír - Hubička, Zdeněk - Chvostová, Dagmar - Šíchová, H. - Valvoda, V. - Tarasenko, A. A. - Studnička, Václav - Wagner, T. - Novák, Miloš
Copper nitride thin films prepared by the RF plasma chemical reactor with low pressure supersonic single and multi-plasma jet system.
Surface and Coatings Technology. 116-119, - (1999), s. 321-326. ISSN 0257-8972.
[International Congerence on Plasma Surface Engineering /6./. Garmisch-Partenkirchen, 14.09.1998-18.09.1998]
Impact factor: 1.008, year: 1999
http://hdl.handle.net/11104/0030834
Number of the records: 1