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Structuring of diamond films by reactive ion plasma etching

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    0389420 - FZÚ 2013 RIV CZ eng K - Conference Paper (Czech conference)
    Domonkos, M. - Ižák, Tibor - Proška, J. - Kromka, Alexander
    Structuring of diamond films by reactive ion plasma etching.
    Nanomateriály a nanotechnologie ve stavebnictví 2012 (NaNS 2012). Praha: ČVUT, 2012 - (Rácová, Z.; Tesárek, P.; Nežerka, V.; Ryparová, P.), s. 35-40. ISBN 978-80-01-05132-0.
    [Nanomateriály a nanotechnologie ve stavebnictví 2012 (NaNS 2012). Praha (CZ), 11.09.2012-11.09.2012]
    R&D Projects: GA ČR GAP108/12/0910; GA ČR(CZ) GAP108/11/0794; GA AV ČR(CZ) IAAX00100902
    Institutional research plan: CEZ:AV0Z10100521
    Keywords : nanostructuring * diamond thin films * reactive ion etching * scanning electron microscopy
    Subject RIV: BM - Solid Matter Physics ; Magnetism

    Permanent Link: http://hdl.handle.net/11104/0218280
     
Number of the records: 1  

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