Number of the records: 1
Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere
- 1.0364640 - FZÚ 2012 RIV CH eng J - Journal Article
Čada, Martin - Hubička, Zdeněk - Adámek, Petr - Klusoň, Jan - Jastrabík, Lubomír
Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere.
Surface and Coatings Technology. Roč. 205, č. 2 (2011), S317-S321. ISSN 0257-8972
R&D Projects: GA ČR GP202/09/P159; GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002; GA AV ČR KAN400720701; GA ČR GA202/09/0800
Institutional research plan: CEZ:AV0Z10100522
Keywords : HiPIMS * Langmuir probe * ion flux * reactive sputtering
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.867, year: 2011
Permanent Link: http://hdl.handle.net/11104/0200073
Number of the records: 1