Number of the records: 1
In-situ monitoring of the growth of nanostructured aluminum thin film
- 1.0361263 - FZÚ 2013 RIV US eng J - Journal Article
Novotný, Michal - Bulíř, Jiří - Lančok, Ján - Pokorný, Petr - Bodnár, Michal
In-situ monitoring of the growth of nanostructured aluminum thin film.
Journal of Nanophotonics. Roč. 5, č. 5 (2011), "051503-1"-"051503-10". ISSN 1934-2608
R&D Projects: GA AV ČR IAA100100718; GA AV ČR IAA100100729; GA ČR GP202/09/P324
Institutional research plan: CEZ:AV0Z10100522
Keywords : aluminum ultrathin film * magnetron sputtering * in-situ monitoring * electrical conductivity * spectral ellipsometry * optical emission spectroscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.570, year: 2011
Permanent Link: http://hdl.handle.net/11104/0198619
Number of the records: 1