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Laser Source for Interferometry in Nanometrology
- 1.0352194 - ÚPT 2011 RIV CA eng C - Conference Paper (international conference)
Hrabina, Jan - Lazar, Josef - Číp, Ondřej - Čížek, Martin
Laser Source for Interferometry in Nanometrology.
Proceedings of the International Conference on Nanotechnology: Fundamentals and Applications. Ottawa: International ASET, 2010, 541: 1-6. ISBN 978-0-9867183-0-4.
[Nanotechnology: Fundamentals and Applications. Ottawa (CA), 04.08.2010-06.08.2010]
R&D Projects: GA MŠMT(CZ) LC06007; GA MŠMT 2C06012; GA MPO 2A-1TP1/127; GA MPO FT-TA3/133; GA MPO 2A-3TP1/113; GA ČR GA102/09/1276; GA ČR GA102/07/1179
Institutional research plan: CEZ:AV0Z20650511
Keywords : nanometrology * AFM microscopy * interferometry
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0191764
Number of the records: 1