Number of the records: 1
Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina
- 1.0351378 - FZÚ 2011 RIV DE eng J - Journal Article
Pokorný, Petr - Bulíř, Jiří - Lančok, Ján - Musil, Jindřich - Novotný, Michal
Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina.
Plasma Processes and Polymers. Roč. 7, č. 11 (2010), s. 910-914. ISSN 1612-8850. E-ISSN 1612-8869
R&D Projects: GA AV ČR IAA100100718; GA AV ČR KAN400100653; GA ČR GP202/09/P324
Institutional research plan: CEZ:AV0Z10100522
Keywords : aluminium oxide * ion-energy distribution function * magnetron * mass spectrometry * pulsed discharges
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.643, year: 2010
Permanent Link: http://hdl.handle.net/11104/0191144
Number of the records: 1