Number of the records: 1
Imaging of dopants under presence of surface ad-layers
- 1.0350664 - ÚPT 2011 RIV CZ eng C - Conference Paper (international conference)
Mika, Filip - Hovorka, Miloš - Frank, Luděk
Imaging of dopants under presence of surface ad-layers.
Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2010 - (Mika, F.), s. 35-36. ISBN 978-80-254-6842-5.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./. Skalský dvůr (CZ), 31.05.2010-04.06.2010]
R&D Projects: GA ČR GP102/09/P543
Institutional research plan: CEZ:AV0Z20650511
Keywords : scanning electron microscopy * semiconductor structures * image contrast * dopant concentration * secondary electron emission
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://arl-repository.lib.cas.cz/uloziste_av/UPT-D/cav_un_epca-0350664_01.pdf
Permanent Link: http://hdl.handle.net/11104/0190604
Number of the records: 1