Number of the records: 1
On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films
- 1.0341419 - ÚACH 2010 RIV NL eng J - Journal Article
Gutwirth, J. - Wágner, T. - Bezdička, Petr - Hrdlička, M. - Vlček, Milan - Frumar, M.
On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films.
Journal of Non-Crystalline Solids. Roč. 355, 37-42 (2009), s. 1935-1938. ISSN 0022-3093. E-ISSN 1873-4812
R&D Projects: GA MŠMT LC523; GA ČR GA203/06/1368
Institutional research plan: CEZ:AV0Z40320502; CEZ:AV0Z40500505
Keywords : amorphous semiconductors * films and coatings * sputtering
Subject RIV: CA - Inorganic Chemistry
Impact factor: 1.252, year: 2009
Permanent Link: http://hdl.handle.net/11104/0184416
Number of the records: 1