Number of the records: 1
Profiling N-Type Dopants in Silicon
- 1.0340745 - ÚPT 2010 RIV JP eng J - Journal Article
Hovorka, Miloš - Mika, Filip - Mikulík, P. - Frank, Luděk
Profiling N-Type Dopants in Silicon.
Materials Transactions. Roč. 51, č. 2 (2010), s. 237-242. ISSN 1345-9678. E-ISSN 1347-5320
R&D Projects: GA ČR GP102/09/P543; GA AV ČR IAA100650803
Institutional research plan: CEZ:AV0Z20650511
Keywords : silicon * dopant contrast * photoemission electron microscopy * scanning electron microscopy
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 0.779, year: 2010
http://www.jim.or.jp/journal/e/51/02/237.html
Permanent Link: http://hdl.handle.net/11104/0183926
Number of the records: 1