Electron beam induced current measurement on a specimen biased in a cathode lens

0335265 - ÚPT 2010 RIV AT eng C - Conference Paper (international conference)
Horáček, Miroslav - Zobač, Martin - Vlček, Ivan
Electron beam induced current measurement on a specimen biased in a cathode lens.
MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. Graz: Verlag der Technischen Universität, 2009, Vol. 1: 211-212. ISBN 978-3-85125-062-6.
[MC 2009 - Joint Meeting of Dreiländertagung and Multinational Congress on Microscopy /9./. Graz (AT), 30.08.2009-04.09.2009]
R&D Projects: GA AV ČR IAA100650803
Institutional research plan: CEZ:AV0Z20650511
Keywords : elektron beam induced current * SEM * very low energy electrons * cathode lens * specimen bias
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.univie.ac.at/asem/Graz_MC_09/papers/77645.pdf

Permanent Link: http://hdl.handle.net/11104/0179775