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Local probe microscopy with interferometric monitoring of the stage nanopositioning
- 1.0330674 - ÚPT 2010 RIV GB eng J - Journal Article
Lazar, Josef - Klapetek, P. - Číp, Ondřej - Čížek, Martin - Šerý, Mojmír
Local probe microscopy with interferometric monitoring of the stage nanopositioning.
Measurement Science and Technology. Roč. 20, č. 8 (2009), 084007: 1-6. ISSN 0957-0233. E-ISSN 1361-6501
R&D Projects: GA AV ČR IAA200650504; GA MŠMT 2C06012; GA MŠMT(CZ) LC06007; GA MPO 2A-1TP1/127; GA MPO FT-TA3/133; GA MPO 2A-3TP1/113; GA ČR GA102/07/1179
Institutional research plan: CEZ:AV0Z20650511
Keywords : interferometry * local probe microscopy * nanometrology * nanoscale * surface probe microscopy (SPM) * atomic force microscopy (AFM) * nanopositioning interferometry
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.317, year: 2009
Permanent Link: http://hdl.handle.net/11104/0176405
Number of the records: 1