In situ optical and electrical analysis of transient plasmas generated by ns-laser ablation for Ag nanostructured film production

0546676 - FZÚ 2022 RIV GB eng J - Journal Article
Irimiciuc, Stefan - Chertopalov, Sergii - Bulíř, Jiří - Fekete, Ladislav - Vondráček, Martin - Novotný, Michal - Craciun, V. - Lančok, Ján
In situ optical and electrical analysis of transient plasmas generated by ns-laser ablation for Ag nanostructured film production.
Vacuum. Roč. 193, Nov. (2021), č. článku 110528. ISSN 0042-207X. E-ISSN 1879-2715
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR(CZ) GA20-21069S
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : Langmuir probe * optical emission spectroscopy * perturbative probe * plasma dynamics * thickness profile * Ag nanoparticles * laser ablation
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 4.110, year: 2021
Method of publishing: Limited access
https://doi.org/10.1016/j.vacuum.2021.110528

The continuous effort for transitioning pulsed laser deposition (PLD) technique from an experimental tool into an industrial one can be sustained by the use of complex tools for in situ real-time monitoring of the deposition process. Langmuir Probe (LP) and optical emission spectroscopy (OES) measurements were used for plasma monitoring during PLD of silver films under various Ar pressure conditions. The LP measurements revealed a multi-structured distribution of the ions, which was strongly influenced by the increase of Ar pressure.
Permanent Link: http://hdl.handle.net/11104/0323191