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Beam shaping and probe characterization in the scanning electron microscope

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    0543063 - ÚPT 2022 RIV NL eng J - Journal Article
    Řiháček, Tomáš - Horák, M. - Schachinger, T. - Mika, Filip - Matějka, Milan - Krátký, Stanislav - Fořt, Tomáš - Radlička, Tomáš - Johnson, C. W. - Novák, L. - Seďa, B. - McMorran, B.J. - Müllerová, Ilona
    Beam shaping and probe characterization in the scanning electron microscope.
    Ultramicroscopy. Roč. 225, June (2021), č. článku 113268. ISSN 0304-3991. E-ISSN 1879-2723
    R&D Projects: GA TA ČR(CZ) TN01000008
    Institutional support: RVO:68081731
    Keywords : Electron diffraction * SEM * Electron beam structuring * Spot shape measurement * Electron vortex beam
    OECD category: Particles and field physics
    Impact factor: 2.994, year: 2021
    Method of publishing: Open access
    https://www.sciencedirect.com/science/article/pii/S0304399121000589
    Permanent Link: http://hdl.handle.net/11104/0320365
     
     
Number of the records: 1  

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