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The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography

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    0525371 - ÚJF 2021 RIV US eng J - Journal Article
    Romanenko, Oleksandr V. - Slepička, P. - Malinský, Petr - Cutroneo, Mariapompea - Havránek, Vladimír - Stammers, James H. - Švorčík, V. - Macková, Anna
    The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography.
    Surface and Interface Analysis. Roč. 52, č. 12 (2020), s. 1040-1044. ISSN 0142-2421. E-ISSN 1096-9918
    R&D Projects: GA ČR GA19-02482S; GA MŠMT LM2015056; GA MŠMT EF16_013/0001812
    Institutional support: RVO:61389005
    Keywords : gold nanoparticles * ion beam lithography * microstructure * PDMS * shrinkage
    OECD category: Nano-materials (production and properties)
    Impact factor: 1.607, year: 2020
    Method of publishing: Limited access
    https://doi.org/10.1002/sia.6821
    Permanent Link: http://hdl.handle.net/11104/0312722
     
     
Number of the records: 1  

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