Number of the records: 1
STEM detector in SEM
- 1.0502126 - ÚPT 2019 NL eng A - Abstract
Konvalina, Ivo - Paták, Aleš - Materna Mikmeková, Eliška - Müllerová, Ilona
STEM detector in SEM.
FEELIS-III. Amsterdam: ARCNL, 2018. s. 55-56.
[LEELIS-III. Low Energy Elwctrons: Lithography, Imaging and Soft Matter. 12.11.2018-13.11.2018, Amsterdam]
R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : STEM * SEM
OECD category: Electrical and electronic engineering
Permanent Link: http://hdl.handle.net/11104/0294115
Number of the records: 1