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Mechanical properties of Al thin film measured by two different methods

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    0368997 - ÚFM 2012 RIV SK eng J - Journal Article
    Kuběna, Ivo - Kruml, Tomáš
    Mechanical properties of Al thin film measured by two different methods.
    Acta Metallurgica Slovaca. - (Longauerová, M.). Roč. 17, č. 3 (2011), s. 163-168. ISSN 1338-1156
    Institutional research plan: CEZ:AV0Z20410507
    Keywords : thin films * focused ion beam * aluminium * nanoindentation
    Subject RIV: JJ - Other Materials
    Permanent Link: http://hdl.handle.net/11104/0203178
     
     
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