Number of the records: 1
FIB Induced Damage Examined with the Low Energy SEM
- 1.0365942 - ÚPT 2012 RIV JP eng J - Journal Article
Mikmeková, Šárka - Matsuda, K. - Watanabe, K. - Ikeno, S. - Müllerová, Ilona - Frank, Luděk
FIB Induced Damage Examined with the Low Energy SEM.
Materials Transactions. Roč. 52, č. 3 (2011), s. 292-296. ISSN 1345-9678. E-ISSN 1347-5320
R&D Projects: GA MŠMT OE08012
Institutional research plan: CEZ:AV0Z20650511
Keywords : scanning low energy electron microscopy * focused ion beam * beam induced damage * sputtering
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 0.699, year: 2011
Permanent Link: http://hdl.handle.net/11104/0201068
Number of the records: 1