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Laser interference nano-comparator for length sensor calibration in nanometric scale
- 1.0352200 - ÚPT 2011 RIV CZ eng C - Conference Paper (international conference)
Číp, Ondřej - Mikel, Břetislav - Čížek, Martin - Šmíd, Radek - Buchta, Zdeněk - Lazar, Josef
Laser interference nano-comparator for length sensor calibration in nanometric scale.
2nd International Conference NANOCON 2010. Ostrava: Tanger s.r.o, 2010, s. 274-277. ISBN 978-80-87294-19-2.
[NANOCON 2010. International Conference /2./. Olomouc (CZ), 12.10.2010-14.10.2010]
R&D Projects: GA MŠMT(CZ) LC06007; GA AV ČR KAN311610701; GA ČR GA102/09/1276; GA MPO FR-TI1/241; GA ČR GAP102/10/1813
Institutional research plan: CEZ:AV0Z20650511
Keywords : nanoscale * precise measurement * laser * interferometer
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0191769
Number of the records: 1