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Interferometric Displacement Measurement for Local Probe Microscopy
- 1.0325114 - ÚPT 2009 RIV DE eng J - Journal Article
Lazar, Josef - Číp, Ondřej - Čížek, Martin - Šerý, Mojmír
Interferometric Displacement Measurement for Local Probe Microscopy.
[Interferometrické měření polohy pro mikroskopii s lokální sondou.]
tm-Technisches Messen. Roč. 76, č. 5 (2009), s. 253-258. ISSN 0171-8096
R&D Projects: GA MŠMT(CZ) LC06007; GA AV ČR IAA200650504; GA AV ČR KAN311610701; GA MPO 2A-1TP1/127; GA MPO FT-TA3/133; GA MPO 2A-3TP1/113; GA ČR GA102/07/1179; GA MŠMT 2C06012
Institutional research plan: CEZ:AV0Z20650511
Keywords : Interferometry * local probe microscopy * nanometrology
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 0.321, year: 2009
Permanent Link: http://hdl.handle.net/11104/0172639
Number of the records: 1