Number of the records: 1
Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double RF hollow cathode plasma jet system
- 1.0319065 - FZÚ 2009 RIV DE eng J - Journal Article
Hubička, Zdeněk - Virostko, Petr - Tichý, M. - Čada, Martin - Adámek, Petr - Olejníček, Jiří - Deyneka, Alexander - Churpita, Olexandr - Valvoda, V. - Jastrabík, Lubomír
Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system.
[Depozice tenkých vrstev BaxSr1-xTiO3 pomocí systému dvou vysokofrekvenčních plazmových trysek s efektem duté katody.]
Contributions to Plasma Physics. Roč. 48, 5-7 (2008), s. 515-520. ISSN 0863-1042. E-ISSN 1521-3986
R&D Projects: GA AV ČR KAN301370701; GA AV ČR KJB100100707; GA AV ČR 1QS100100563; GA ČR GA202/06/0776
Institutional research plan: CEZ:AV0Z10100522
Keywords : BSTO * ferroelectric films * hollow cathode * Langmuir probe * optical emission spectroscopy * plasma jet
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.250, year: 2008
Permanent Link: http://hdl.handle.net/11104/0168325
Number of the records: 1