Number of the records: 1
Measurement of coherence properties of scanning electron microscope
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$a Measurement of coherence properties of scanning electron microscope 215 $a 1 s. $c P 463 -1
$1 001 cav_un_epca*0431329 $1 010 $a 978-80-87441-11-4 $1 200 1 $a 9th International Conference on Charged Particle Optics. Book of Abstracts $v S. 65 $1 210 $a Brno $c Institute of Scientific Instruments AS CR, v. v. i $d 2014 610 0-
$a coherence 610 0-
$a diffraction 610 0-
$a scanning electron microscope 700 -1
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Number of the records: 1