Number of the records: 1  

Imaging of dopants under presence of surface ad-layers

  1. SYS0350664
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    $a 20101201d m y slo 03 ba
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    $a eng
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    $a CZ
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    $a Imaging of dopants under presence of surface ad-layers
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    $a 2 s.
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    $1 001 cav_un_epca*0350656 $1 010 $a 978-80-254-6842-5 $1 200 1 $a Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation $v S. 35-36 $1 210 $a Brno $c Institute of Scientific Instruments AS CR, v.v.i $d 2010 $1 702 1 $a Mika $b F. $4 340
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    $a scanning electron microscopy
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    $a semiconductor structures
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    $a image contrast
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    $a dopant concentration
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    $a secondary electron emission
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    $3 cav_un_auth*0101596 $a Mika $b Filip $i D1: Elektronová mikroskopie $j D1: Electron Microscopy $p UPT-D $w Electron Microscopy $4 070 $T Ústav přístrojové techniky AV ČR, v. v. i.
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    $3 cav_un_auth*0052204 $a Hovorka $b Miloš $i D1: Elektronová mikroskopie $j D1: Electron Microscopy $p UPT-D $4 070 $T Ústav přístrojové techniky AV ČR, v. v. i.
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    $3 cav_un_auth*0101547 $a Frank $b Luděk $i D1: Elektronová mikroskopie $j D1: Electron Microscopy $p UPT-D $w Electron Microscopy $4 070 $T Ústav přístrojové techniky AV ČR, v. v. i.
Number of the records: 1  

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