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RIR MAPLE Procedure for Deposition of Carbon Rich Si/C/H Films
- 1.Dřínek, V., Strašák, T., Novotný, F., Fajgar, R., Bastl, Z. RIR MAPLE Procedure for Deposition of Carbon Rich Si/C/H Films. Applied Surface Science. 2014, 292(FEB 15), 413-419. ISSN 0169-4332. E-ISSN 1873-5584. Available: doi: 10.1016/j.apsusc.2013.11.153
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