Microdevices for Cell Stimulation: Integrated Zinc Oxide Piezoelectric Nanostructures in Silicon Microparticles

Lefaix, L., Blanquer, A., Bačáková, L., Esteve, J., Murillo, G. Microdevices for Cell Stimulation: Integrated Zinc Oxide Piezoelectric Nanostructures in Silicon Microparticles. In: 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. New York: IEEE, 2021, s. 559-562. ISBN 978-1-6654-1912-3. Available: doi: 10.1109/MEMS51782.2021.9375134.