In-situ plasma monitoring by optical emission spectroscopy during pulsed laser deposition of doped Lu.sub.2./sub.O.sub.3./sub.

Irimiciuc, S., More Chevalier, J., Chertopalov, S., Fekete, L., Novotný, M., Havlová, Š., Poupon, M., Zikmund, T., Kůsová, K., Lančok, J. In-situ plasma monitoring by optical emission spectroscopy during pulsed laser deposition of doped Lu₂O₃. Applied Physics B-Lasers and Optics. 2021, 127(10), 140. ISSN 0946-2171. E-ISSN 1432-0649. Available: doi: 10.1007/s00340-021-07689-4.