Selective modification of electrical insulator material by ion micro beam for the fabrication of circuit elements

Cutroneo, M., Havránek, V., Macková, A., Malinský, P., Torrisi, A., Silipigni, L., Sofer, Z., Torrisi, L. Selective modification of electrical insulator material by ion micro beam for the fabrication of circuit elements. Radiation Effects and Defects in Solids. 2020, 175(3-4), 307-317. ISSN 1042-0150. E-ISSN 1029-4953. Available: doi: 10.1080/10420150.2019.1701462.