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Fabrication of functional nanostructures in thin silicon nitride membranes
- 1.Matějka, M., Chlumská, J., Krátký, S., Řiháček, T., Knápek, A., Kolařík, V. Fabrication of functional nanostructures in thin silicon nitride membranes. In: Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
Number of the records: 1